MEMS-based transmission lines for microwave applications
نویسندگان
چکیده
This paper mainly presents a briefly review for recent progress in MEMS-based transmission lines for use in microwave and millimeterwave range. MEMS-based transmission lines including different transmission line structure such as membranesupported microstrip line microstrip line, coplanar microshield transmission line, LIGA micromachined planar transmission line, micromachined waveguides and coplanar waveguide are discussed. MEMS-based transmission lines are characterized by low propagation loss, wide operation frequency band, low dispersion and high quality factor, in addition, the fabrication is compatible with traditional processing of integrated circuits(IC’s). The emergence of MEMS-based transmission lines provided a solution for miniaturizing microwave system and monolithic microwave integrated circuits.
منابع مشابه
Micromachined Transmission Lines for Microwave Applications
5 Zusammenfassung 7 1 Introduction 9 1.1 High frequency requirements of modern electronic systems 10 1.2 State-of-the-art MEMS micromachining 12 1.3 State-of-the-art transmission lines and waveguides 15 1.4 Organization of the thesis 21
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